CHARACTERIZATION OF PLASMA-DEPOSITED AMORPHOUS HYDROGENATED CARBON-FILMS BY NEUTRON REFLECTIVITY
Thin films (less than 2000 Å) of amorphous hydrogenated carbon have been characterized by neutron reflectivity measurements. Films were deposited onto silicon substrates from a methane r.f. plasma to produce both very hard and very soft materials. The critical angle and density give the film composi...
| Main Authors: | , , , , , , , , , |
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| Format: | Journal article |
| Language: | English |
| Published: |
1989
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