Micro-fracture testing of Ni-W microbeams produced by electrodeposition and FIB machining
Electrodeposited nickel-tungsten alloys are being considered as a candidate material for components for microelectromechanical systems (MEMS) fabricated by the LIGA (German acronym for lithography, electrodeposition, and forming) technology. In spite of having a useful range of properties including;...
| Главные авторы: | , , , |
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| Формат: | Journal article |
| Язык: | English |
| Опубликовано: |
2007
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