A quantitative method for measuring small residual beam tilts in high-resolution transmission electron microscopy
In a transmission electron microscope, electron illumination beam tilt, or the degree of deviation of electron beam from its optical axis, is an important parameter that has a significant impact on image contrast and image interpretation. Although a large beam tilt can easily be noticed and correcte...
Main Authors: | , , , , |
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Format: | Journal article |
Language: | English |
Published: |
Elsevier
2017
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