Contamination of silicon by iron at temperatures below 800 degrees C

Contamination of silicon by iron at temperatures below 800 degrees C

Iron-related defects are deleterious in silicon-based integrated circuits and photovoltaics, ruining devices and acting as strong recombination centres. Unless great care is taken, iron contamination will result from high temperature processing and so it is essential to understand the degree to whic...

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Autors principals:	Murphy, J, Falster, R
Format:	Journal article
Idioma:	English
Publicat:	2011

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