Contamination of silicon by iron at temperatures below 800 degrees C

Iron-related defects are deleterious in silicon-based integrated circuits and photovoltaics, ruining devices and acting as strong recombination centres. Unless great care is taken, iron contamination will result from high temperature processing and so it is essential to understand the degree to whic...

詳細記述

書誌詳細
主要な著者: Murphy, J, Falster, R
フォーマット: Journal article
言語:English
出版事項: 2011

類似資料