Note: micro-cantilevers with AlN actuators and PtSi tips for multi-frequency atomic force microscopy.
We report the design, fabrication, and characterization of cantilevers with integrated AlN actuators and conductive PtSi tips for multi-frequency atomic force microscopy. These cantilevers also possess a stepped-rectangular geometry. The excellent dynamic behavior of these cantilevers is investigate...
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Bibliographic Details
| Main Authors: |
Sebastian, A,
Shamsudhin, N,
Rothuizen, H,
Drechsler, U,
Koelmans, W,
Bhaskaran, H,
Quenzer, H,
Wagner, B,
Despont, M |
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| Format: | Journal article
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| Language: | English |
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| Published: |
2012
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