Note: micro-cantilevers with AlN actuators and PtSi tips for multi-frequency atomic force microscopy.
We report the design, fabrication, and characterization of cantilevers with integrated AlN actuators and conductive PtSi tips for multi-frequency atomic force microscopy. These cantilevers also possess a stepped-rectangular geometry. The excellent dynamic behavior of these cantilevers is investigate...
| Main Authors: | , , , , , , , , |
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| Format: | Journal article |
| Language: | English |
| Published: |
2012
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| _version_ | 1797084754550456320 |
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| author | Sebastian, A Shamsudhin, N Rothuizen, H Drechsler, U Koelmans, W Bhaskaran, H Quenzer, H Wagner, B Despont, M |
| author_facet | Sebastian, A Shamsudhin, N Rothuizen, H Drechsler, U Koelmans, W Bhaskaran, H Quenzer, H Wagner, B Despont, M |
| author_sort | Sebastian, A |
| collection | OXFORD |
| description | We report the design, fabrication, and characterization of cantilevers with integrated AlN actuators and conductive PtSi tips for multi-frequency atomic force microscopy. These cantilevers also possess a stepped-rectangular geometry. The excellent dynamic behavior of these cantilevers is investigated using both finite-element simulations and experimental methods. Several imaging experiments are presented to illustrate the efficacy and versatility of these cantilevers. |
| first_indexed | 2024-03-07T01:59:27Z |
| format | Journal article |
| id | oxford-uuid:9cd88eb4-1632-41b2-9c8c-b54664d32abf |
| institution | University of Oxford |
| language | English |
| last_indexed | 2024-03-07T01:59:27Z |
| publishDate | 2012 |
| record_format | dspace |
| spelling | oxford-uuid:9cd88eb4-1632-41b2-9c8c-b54664d32abf2022-03-27T00:39:01ZNote: micro-cantilevers with AlN actuators and PtSi tips for multi-frequency atomic force microscopy.Journal articlehttp://purl.org/coar/resource_type/c_dcae04bcuuid:9cd88eb4-1632-41b2-9c8c-b54664d32abfEnglishSymplectic Elements at Oxford2012Sebastian, AShamsudhin, NRothuizen, HDrechsler, UKoelmans, WBhaskaran, HQuenzer, HWagner, BDespont, MWe report the design, fabrication, and characterization of cantilevers with integrated AlN actuators and conductive PtSi tips for multi-frequency atomic force microscopy. These cantilevers also possess a stepped-rectangular geometry. The excellent dynamic behavior of these cantilevers is investigated using both finite-element simulations and experimental methods. Several imaging experiments are presented to illustrate the efficacy and versatility of these cantilevers. |
| spellingShingle | Sebastian, A Shamsudhin, N Rothuizen, H Drechsler, U Koelmans, W Bhaskaran, H Quenzer, H Wagner, B Despont, M Note: micro-cantilevers with AlN actuators and PtSi tips for multi-frequency atomic force microscopy. |
| title | Note: micro-cantilevers with AlN actuators and PtSi tips for multi-frequency atomic force microscopy. |
| title_full | Note: micro-cantilevers with AlN actuators and PtSi tips for multi-frequency atomic force microscopy. |
| title_fullStr | Note: micro-cantilevers with AlN actuators and PtSi tips for multi-frequency atomic force microscopy. |
| title_full_unstemmed | Note: micro-cantilevers with AlN actuators and PtSi tips for multi-frequency atomic force microscopy. |
| title_short | Note: micro-cantilevers with AlN actuators and PtSi tips for multi-frequency atomic force microscopy. |
| title_sort | note micro cantilevers with aln actuators and ptsi tips for multi frequency atomic force microscopy |
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