Influence of precession electron diffraction parameters and energy filtering on reduced density function analysis of thin amorphous silica films—implications for structural studies

We investigated the influence of precession angle, energy filtering and sample thickness on the structural parameters of amorphous SiO2 thin films from the electron reduced density functions obtained by applying precession electron diffraction. The results demonstrate that the peak positions in the...

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Bibliographic Details
Main Authors: Chou, Y-J, Borisenko, KB, Das, PP, Nicolopoulos, S, Gemmi, M, Kirkland, AI
Format: Journal article
Language:English
Published: MDPI 2023