Measuring isoplanaticity in high-resolution electron microscopy

We recently reported on a new method for the accurate determination of the symmetric aberration coefficients (defocus and twofold astigmatism) from a focal series of high resolution images based on an analysis of the image Fourier transform phases. This can be extended to also cover the antisymmetri...

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Главные авторы: Meyer, R, Kirkland, A
Формат: Conference item
Опубликовано: 2004
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author Meyer, R
Kirkland, A
author_facet Meyer, R
Kirkland, A
author_sort Meyer, R
collection OXFORD
description We recently reported on a new method for the accurate determination of the symmetric aberration coefficients (defocus and twofold astigmatism) from a focal series of high resolution images based on an analysis of the image Fourier transform phases. This can be extended to also cover the antisymmetric aberrations (axial coma and three-fold astigmatism) by recording a combined tilt-focal series where at each beam tilt a short focal series of three images is recorded. In this paper we apply this method to investigate the variation of the wave aberration function coefficients across the field of view by an aberration measurement for an array of 7x7 independent subregions. For some datasets, a very significant variation of the axial coma was found, consistent with a convergence of the incident illumination that leads to a mistilt of up to 1 mrad at the borders of the field of view. This shows that the setting up of truly parallel illumination is important and difficult. No significant variations were found in the other aberration parameters. The non-parallelity of the illumination can also be assessed by measuring the focus-induced change in the magnification, and a good agreement was found between the two methods.
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spelling oxford-uuid:a7d4c3ac-cf8d-4f7f-9b13-1a87c6d8c9772022-03-27T02:57:03ZMeasuring isoplanaticity in high-resolution electron microscopyConference itemhttp://purl.org/coar/resource_type/c_5794uuid:a7d4c3ac-cf8d-4f7f-9b13-1a87c6d8c977Symplectic Elements at Oxford2004Meyer, RKirkland, AWe recently reported on a new method for the accurate determination of the symmetric aberration coefficients (defocus and twofold astigmatism) from a focal series of high resolution images based on an analysis of the image Fourier transform phases. This can be extended to also cover the antisymmetric aberrations (axial coma and three-fold astigmatism) by recording a combined tilt-focal series where at each beam tilt a short focal series of three images is recorded. In this paper we apply this method to investigate the variation of the wave aberration function coefficients across the field of view by an aberration measurement for an array of 7x7 independent subregions. For some datasets, a very significant variation of the axial coma was found, consistent with a convergence of the incident illumination that leads to a mistilt of up to 1 mrad at the borders of the field of view. This shows that the setting up of truly parallel illumination is important and difficult. No significant variations were found in the other aberration parameters. The non-parallelity of the illumination can also be assessed by measuring the focus-induced change in the magnification, and a good agreement was found between the two methods.
spellingShingle Meyer, R
Kirkland, A
Measuring isoplanaticity in high-resolution electron microscopy
title Measuring isoplanaticity in high-resolution electron microscopy
title_full Measuring isoplanaticity in high-resolution electron microscopy
title_fullStr Measuring isoplanaticity in high-resolution electron microscopy
title_full_unstemmed Measuring isoplanaticity in high-resolution electron microscopy
title_short Measuring isoplanaticity in high-resolution electron microscopy
title_sort measuring isoplanaticity in high resolution electron microscopy
work_keys_str_mv AT meyerr measuringisoplanaticityinhighresolutionelectronmicroscopy
AT kirklanda measuringisoplanaticityinhighresolutionelectronmicroscopy