High-quality amorphous silicon carbide for hybrid photonic integration deposited at a low temperature
Integrated photonic platforms have proliferated in recent years, each demonstrating its unique strengths and shortcomings. Given the processing incompatibilities of different platforms, a formidable challenge in the field of integrated photonics still remains for combining the strengths of different...
Main Authors: | Lopez-Rodriguez, B, van der Kolk, R, Aggarwal, S, Sharma, N, Li, Z, van der Plaats, D, Scholte, T, Chang, J, Gröblacher, S, Pereira, SF, Bhaskaran, H, Zadeh, IE |
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Format: | Journal article |
Language: | English |
Published: |
American Chemical Society
2023
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