Adaptive optics for direct writing in three-dimensional nano-fabrication
Aberrations affect the focal spot quality in direct laser write applications when focusing through a refractive index mismatch. We develop adaptive optics to correct aberrations and demonstrate improved fabrication depth in several substrates. (C) 2009 Optical Society of America
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IEEE
2010
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Adaptive optics for direct writing in three-dimensional nano-fabrication
Published 2010
Conference item