Inverse eigenvalue sensing with corner coupled square plate MEMS resonators array
Monitoring the collective behaviour of coupled micro/nano resonators array provides a distinct opportunity for high resolution multi-function sensing. We report an inverse eigenvalue analysis based sensing approach for large array of coupled micro/nano resonators. A new characterization algorithm is...
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| Format: | Journal article |
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Springer Verlag
2018
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| _version_ | 1797088043252842496 |
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| author | Tao, G Choubey, B |
| author_facet | Tao, G Choubey, B |
| author_sort | Tao, G |
| collection | OXFORD |
| description | Monitoring the collective behaviour of coupled micro/nano resonators array provides a distinct opportunity for high resolution multi-function sensing. We report an inverse eigenvalue analysis based sensing approach for large array of coupled micro/nano resonators. A new characterization algorithm is proposed to precisely extract the system matrix of those multiplexed sensors with reduced algorithmic complexity and below 1% relative error. The method has been verified experimentally using five corner coupled square plate MEMS resonators with a natural frequency close to 0.85 MHz. The method is also capable of characterizing the fabrication process and important sensor parameters such as the spring constant and coupling ratio. |
| first_indexed | 2024-03-07T02:44:15Z |
| format | Journal article |
| id | oxford-uuid:ab80f8aa-0e5f-4f2d-86db-db9f5ae6d524 |
| institution | University of Oxford |
| last_indexed | 2024-03-07T02:44:15Z |
| publishDate | 2018 |
| publisher | Springer Verlag |
| record_format | dspace |
| spelling | oxford-uuid:ab80f8aa-0e5f-4f2d-86db-db9f5ae6d5242022-03-27T03:22:18ZInverse eigenvalue sensing with corner coupled square plate MEMS resonators arrayJournal articlehttp://purl.org/coar/resource_type/c_dcae04bcuuid:ab80f8aa-0e5f-4f2d-86db-db9f5ae6d524Symplectic Elements at OxfordSpringer Verlag2018Tao, GChoubey, BMonitoring the collective behaviour of coupled micro/nano resonators array provides a distinct opportunity for high resolution multi-function sensing. We report an inverse eigenvalue analysis based sensing approach for large array of coupled micro/nano resonators. A new characterization algorithm is proposed to precisely extract the system matrix of those multiplexed sensors with reduced algorithmic complexity and below 1% relative error. The method has been verified experimentally using five corner coupled square plate MEMS resonators with a natural frequency close to 0.85 MHz. The method is also capable of characterizing the fabrication process and important sensor parameters such as the spring constant and coupling ratio. |
| spellingShingle | Tao, G Choubey, B Inverse eigenvalue sensing with corner coupled square plate MEMS resonators array |
| title | Inverse eigenvalue sensing with corner coupled square plate MEMS resonators array |
| title_full | Inverse eigenvalue sensing with corner coupled square plate MEMS resonators array |
| title_fullStr | Inverse eigenvalue sensing with corner coupled square plate MEMS resonators array |
| title_full_unstemmed | Inverse eigenvalue sensing with corner coupled square plate MEMS resonators array |
| title_short | Inverse eigenvalue sensing with corner coupled square plate MEMS resonators array |
| title_sort | inverse eigenvalue sensing with corner coupled square plate mems resonators array |
| work_keys_str_mv | AT taog inverseeigenvaluesensingwithcornercoupledsquareplatememsresonatorsarray AT choubeyb inverseeigenvaluesensingwithcornercoupledsquareplatememsresonatorsarray |