Inverse eigenvalue sensing with corner coupled square plate MEMS resonators array

Monitoring the collective behaviour of coupled micro/nano resonators array provides a distinct opportunity for high resolution multi-function sensing. We report an inverse eigenvalue analysis based sensing approach for large array of coupled micro/nano resonators. A new characterization algorithm is...

وصف كامل

التفاصيل البيبلوغرافية
المؤلفون الرئيسيون: Tao, G, Choubey, B
التنسيق: Journal article
منشور في: Springer Verlag 2018