Inverse eigenvalue sensing with corner coupled square plate MEMS resonators array
Monitoring the collective behaviour of coupled micro/nano resonators array provides a distinct opportunity for high resolution multi-function sensing. We report an inverse eigenvalue analysis based sensing approach for large array of coupled micro/nano resonators. A new characterization algorithm is...
| Hoofdauteurs: | , |
|---|---|
| Formaat: | Journal article |
| Gepubliceerd in: |
Springer Verlag
2018
|