Narrowband multispectral filter set for visible band.
We design, fabricate and characterise a narrowband Fabry-Pérot multispectral filter set for the visible range (400-750 nm) that is suitable for integration onto complementary-metal oxide-semiconductor image sensors. We reduce the fabrication steps by fixing the physical cavity length and altering th...
| Main Authors: | , , , , , |
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| Format: | Journal article |
| Language: | English |
| Published: |
2012
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| _version_ | 1826290934842654720 |
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| author | Walls, K Chen, Q Grant, J Collins, S Cumming, DR Drysdale, T |
| author_facet | Walls, K Chen, Q Grant, J Collins, S Cumming, DR Drysdale, T |
| author_sort | Walls, K |
| collection | OXFORD |
| description | We design, fabricate and characterise a narrowband Fabry-Pérot multispectral filter set for the visible range (400-750 nm) that is suitable for integration onto complementary-metal oxide-semiconductor image sensors. We reduce the fabrication steps by fixing the physical cavity length and altering the effective optical length instead. Using electron-beam lithography, a sub-wavelength hole array is patterned in a silicon nitride cavity layer, backfilled with poly(methyl methacrylate), and bounded by aluminium mirrors to create 23 filters with full-width half-maximums of 22-46 nm. Additionally, for colourmetric reproduction applications, using as few as 10 filters gives a colour difference (CIEDE2000) of 0.072, better than trichromatic filters. |
| first_indexed | 2024-03-07T02:51:48Z |
| format | Journal article |
| id | oxford-uuid:adeed469-7ef0-4399-b4e4-115d695c37c2 |
| institution | University of Oxford |
| language | English |
| last_indexed | 2024-03-07T02:51:48Z |
| publishDate | 2012 |
| record_format | dspace |
| spelling | oxford-uuid:adeed469-7ef0-4399-b4e4-115d695c37c22022-03-27T03:39:07ZNarrowband multispectral filter set for visible band.Journal articlehttp://purl.org/coar/resource_type/c_dcae04bcuuid:adeed469-7ef0-4399-b4e4-115d695c37c2EnglishSymplectic Elements at Oxford2012Walls, KChen, QGrant, JCollins, SCumming, DRDrysdale, TWe design, fabricate and characterise a narrowband Fabry-Pérot multispectral filter set for the visible range (400-750 nm) that is suitable for integration onto complementary-metal oxide-semiconductor image sensors. We reduce the fabrication steps by fixing the physical cavity length and altering the effective optical length instead. Using electron-beam lithography, a sub-wavelength hole array is patterned in a silicon nitride cavity layer, backfilled with poly(methyl methacrylate), and bounded by aluminium mirrors to create 23 filters with full-width half-maximums of 22-46 nm. Additionally, for colourmetric reproduction applications, using as few as 10 filters gives a colour difference (CIEDE2000) of 0.072, better than trichromatic filters. |
| spellingShingle | Walls, K Chen, Q Grant, J Collins, S Cumming, DR Drysdale, T Narrowband multispectral filter set for visible band. |
| title | Narrowband multispectral filter set for visible band. |
| title_full | Narrowband multispectral filter set for visible band. |
| title_fullStr | Narrowband multispectral filter set for visible band. |
| title_full_unstemmed | Narrowband multispectral filter set for visible band. |
| title_short | Narrowband multispectral filter set for visible band. |
| title_sort | narrowband multispectral filter set for visible band |
| work_keys_str_mv | AT wallsk narrowbandmultispectralfiltersetforvisibleband AT chenq narrowbandmultispectralfiltersetforvisibleband AT grantj narrowbandmultispectralfiltersetforvisibleband AT collinss narrowbandmultispectralfiltersetforvisibleband AT cummingdr narrowbandmultispectralfiltersetforvisibleband AT drysdalet narrowbandmultispectralfiltersetforvisibleband |