Dislocation imaging using ion beam induced charge
The recently developed ion beam induced charge technique has been used to image bands of misfit dislocations in a 4 μm thick epitaxial layer of Si 0.875Ge0.125 grown on a Si substrate. The smallest resolvable bandwidth is 0.8 μm under present conditions. The factors which presently limit this value,...
| Main Authors: | , , , |
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| Format: | Journal article |
| Language: | English |
| Published: |
1993
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| _version_ | 1826291398360432640 |
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| author | Breese, M King, P Grime, G Wilshaw, P |
| author_facet | Breese, M King, P Grime, G Wilshaw, P |
| author_sort | Breese, M |
| collection | OXFORD |
| description | The recently developed ion beam induced charge technique has been used to image bands of misfit dislocations in a 4 μm thick epitaxial layer of Si 0.875Ge0.125 grown on a Si substrate. The smallest resolvable bandwidth is 0.8 μm under present conditions. The factors which presently limit this value, and methods for improving it are discussed. |
| first_indexed | 2024-03-07T02:58:48Z |
| format | Journal article |
| id | oxford-uuid:b03bab8d-d5e2-45da-9e24-9f85072a730b |
| institution | University of Oxford |
| language | English |
| last_indexed | 2024-03-07T02:58:48Z |
| publishDate | 1993 |
| record_format | dspace |
| spelling | oxford-uuid:b03bab8d-d5e2-45da-9e24-9f85072a730b2022-03-27T03:54:57ZDislocation imaging using ion beam induced chargeJournal articlehttp://purl.org/coar/resource_type/c_dcae04bcuuid:b03bab8d-d5e2-45da-9e24-9f85072a730bEnglishSymplectic Elements at Oxford1993Breese, MKing, PGrime, GWilshaw, PThe recently developed ion beam induced charge technique has been used to image bands of misfit dislocations in a 4 μm thick epitaxial layer of Si 0.875Ge0.125 grown on a Si substrate. The smallest resolvable bandwidth is 0.8 μm under present conditions. The factors which presently limit this value, and methods for improving it are discussed. |
| spellingShingle | Breese, M King, P Grime, G Wilshaw, P Dislocation imaging using ion beam induced charge |
| title | Dislocation imaging using ion beam induced charge |
| title_full | Dislocation imaging using ion beam induced charge |
| title_fullStr | Dislocation imaging using ion beam induced charge |
| title_full_unstemmed | Dislocation imaging using ion beam induced charge |
| title_short | Dislocation imaging using ion beam induced charge |
| title_sort | dislocation imaging using ion beam induced charge |
| work_keys_str_mv | AT breesem dislocationimagingusingionbeaminducedcharge AT kingp dislocationimagingusingionbeaminducedcharge AT grimeg dislocationimagingusingionbeaminducedcharge AT wilshawp dislocationimagingusingionbeaminducedcharge |