IMAGING OF SEMICONDUCTOR DEFECTS USING ION CHANNELING
| Main Authors: | , , , , , , |
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| Format: | Conference item |
| Published: |
1993
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| _version_ | 1826291951002976256 |
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| author | King, P Breese, M Wilshaw, P Booker, G Grime, C Watt, F Goringe, M |
| author_facet | King, P Breese, M Wilshaw, P Booker, G Grime, C Watt, F Goringe, M |
| author_sort | King, P |
| collection | OXFORD |
| description | |
| first_indexed | 2024-03-07T03:07:13Z |
| format | Conference item |
| id | oxford-uuid:b2f586ad-77ef-410d-978e-4d0c09c18e38 |
| institution | University of Oxford |
| last_indexed | 2024-03-07T03:07:13Z |
| publishDate | 1993 |
| record_format | dspace |
| spelling | oxford-uuid:b2f586ad-77ef-410d-978e-4d0c09c18e382022-03-27T04:15:29ZIMAGING OF SEMICONDUCTOR DEFECTS USING ION CHANNELINGConference itemhttp://purl.org/coar/resource_type/c_5794uuid:b2f586ad-77ef-410d-978e-4d0c09c18e38Symplectic Elements at Oxford1993King, PBreese, MWilshaw, PBooker, GGrime, CWatt, FGoringe, M |
| spellingShingle | King, P Breese, M Wilshaw, P Booker, G Grime, C Watt, F Goringe, M IMAGING OF SEMICONDUCTOR DEFECTS USING ION CHANNELING |
| title | IMAGING OF SEMICONDUCTOR DEFECTS USING ION CHANNELING |
| title_full | IMAGING OF SEMICONDUCTOR DEFECTS USING ION CHANNELING |
| title_fullStr | IMAGING OF SEMICONDUCTOR DEFECTS USING ION CHANNELING |
| title_full_unstemmed | IMAGING OF SEMICONDUCTOR DEFECTS USING ION CHANNELING |
| title_short | IMAGING OF SEMICONDUCTOR DEFECTS USING ION CHANNELING |
| title_sort | imaging of semiconductor defects using ion channeling |
| work_keys_str_mv | AT kingp imagingofsemiconductordefectsusingionchanneling AT breesem imagingofsemiconductordefectsusingionchanneling AT wilshawp imagingofsemiconductordefectsusingionchanneling AT bookerg imagingofsemiconductordefectsusingionchanneling AT grimec imagingofsemiconductordefectsusingionchanneling AT wattf imagingofsemiconductordefectsusingionchanneling AT goringem imagingofsemiconductordefectsusingionchanneling |