ANALYSIS OF DEFECTS IN BULK SEMICONDUCTORS USING ELECTRON CHANNELING CONTRAST IMAGING

ANALYSIS OF DEFECTS IN BULK SEMICONDUCTORS USING ELECTRON CHANNELING CONTRAST IMAGING

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Electron channelling contrast imaging (ECCI) is a SEM based technique for imaging and characterising the Burgers vectors of dislocations in bulk samples. Thus, thin foil relaxation effects do not occur and specimen preparation is relatively straightforward. In this paper we present preliminary resul...

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Detalhes bibliográficos
Principais autores:	Czernuszka, J, Long, N, Hirsch, P
Formato:	Conference item
Publicado em:	Publ by Inst of Physics Publ Ltd 1991

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