ANALYSIS OF DEFECTS IN BULK SEMICONDUCTORS USING ELECTRON CHANNELING CONTRAST IMAGING
Electron channelling contrast imaging (ECCI) is a SEM based technique for imaging and characterising the Burgers vectors of dislocations in bulk samples. Thus, thin foil relaxation effects do not occur and specimen preparation is relatively straightforward. In this paper we present preliminary resul...
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Publ by Inst of Physics Publ Ltd
1991
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ANALYSIS OF DEFECTS IN BULK SEMICONDUCTORS USING ELECTRON CHANNELING CONTRAST IMAGING
Veröffentlicht 1991
Journal article