$Glancing-incidence focussed ion beam milling: A coherent X-ray diffraction study of 3D nano-scale lattice strains and crystal defects$

Glancing-incidence focussed ion beam milling: A coherent X-ray diffraction study of 3D nano-scale lattice strains and crystal defects

This study presents a detailed examination of the lattice distortions introduced by glancing incidence Focussed Ion Beam (FIB) milling. Using non-destructive multi-reflection Bragg coherent X-ray diffraction we probe damage formation in an initially pristine gold micro-crystal following several stag...

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Bibliographic Details
Main Authors:	Hofmann, F, Harder, R, Liu, W, Liu, Y, Robinson, I, Zayachuk, Y
Format:	Journal article
Published:	Elsevier 2018

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