GETTERING OF COPPER IN SILICON - PRECIPITATION AT EXTENDED SURFACE-DEFECTS
Selected results from a TEM study of copper precipitation at extended surface defects in silicon are reported. The relative getting effectiveness of surface pits, oxidation induced stacking faults, and their bounding partials is compared. Copper-silicide precipitate colonies on {111} planes are obse...
Main Authors: | Decoteau, M, Wilshaw, P, Falster, R |
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פורמט: | Journal article |
שפה: | English |
יצא לאור: |
Publ by Inst of Physics Publ Ltd
1991
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פריטים דומים
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GETTERING OF COPPER IN SILICON - PRECIPITATION AT EXTENDED SURFACE-DEFECTS
מאת: Decoteau, M, et al.
יצא לאור: (1991) -
GETTERING OF COPPER AND IRON TO EXTENDED SURFACE-DEFECTS IN SILICON
מאת: Decoteau, M, et al.
יצא לאור: (1992) -
PRECIPITATION OF IRON IN SILICON - GETTERING TO EXTENDED SURFACE DEFECT SITES
מאת: Decoteau, M, et al.
יצא לאור: (1991) -
GETTERING OF COPPER TO OXIDATION INDUCED STACKING-FAULTS IN SILICON
מאת: Decoteau, M, et al.
יצא לאור: (1990) -
GETTERING IN SILICON
מאת: Falster, R
יצא לאור: (1989)