Characterisation of porous silicon field emitter properties
The field emission properties and structure of silicon field emitter tips, covered with a porous silicon layer have been studied. The emission from porous silicon emitters with a variety of morphologies, thicknesses and substrate types have been investigated using both an adapted scanning electron m...
| Autors principals: | , , , |
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| Format: | Conference item |
| Publicat: |
IEEE
1995
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