Preparation of site specific transmission electron microscopy plan-view specimens using a focused ion beam system

A focused ion beam system was used to prepare site specific transmission electron microscopy plan view specimens. A new technique was used for this purpose. It consisted of milling a wedge shaped piece of material, lifting it out using needle and micromanipulator, and orientating it on the substrate...

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Main Authors: Langford, R, Huang, Y, Lozano-Perez, S, Titchmarsh, J, Petford-Long, A
Format: Journal article
Published: 2001
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author Langford, R
Huang, Y
Lozano-Perez, S
Titchmarsh, J
Petford-Long, A
author_facet Langford, R
Huang, Y
Lozano-Perez, S
Titchmarsh, J
Petford-Long, A
author_sort Langford, R
collection OXFORD
description A focused ion beam system was used to prepare site specific transmission electron microscopy plan view specimens. A new technique was used for this purpose. It consisted of milling a wedge shaped piece of material, lifting it out using needle and micromanipulator, and orientating it on the substrate with the original surface vertical. Based on the lift-out technique for the preparation of a cross-section specimen, the plane-view specimen was then milled from this piece of material.
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spelling oxford-uuid:c3936e62-26a6-43cc-bfbb-a9885a0d98682022-03-27T06:17:36ZPreparation of site specific transmission electron microscopy plan-view specimens using a focused ion beam systemJournal articlehttp://purl.org/coar/resource_type/c_dcae04bcuuid:c3936e62-26a6-43cc-bfbb-a9885a0d9868Symplectic Elements at Oxford2001Langford, RHuang, YLozano-Perez, STitchmarsh, JPetford-Long, AA focused ion beam system was used to prepare site specific transmission electron microscopy plan view specimens. A new technique was used for this purpose. It consisted of milling a wedge shaped piece of material, lifting it out using needle and micromanipulator, and orientating it on the substrate with the original surface vertical. Based on the lift-out technique for the preparation of a cross-section specimen, the plane-view specimen was then milled from this piece of material.
spellingShingle Langford, R
Huang, Y
Lozano-Perez, S
Titchmarsh, J
Petford-Long, A
Preparation of site specific transmission electron microscopy plan-view specimens using a focused ion beam system
title Preparation of site specific transmission electron microscopy plan-view specimens using a focused ion beam system
title_full Preparation of site specific transmission electron microscopy plan-view specimens using a focused ion beam system
title_fullStr Preparation of site specific transmission electron microscopy plan-view specimens using a focused ion beam system
title_full_unstemmed Preparation of site specific transmission electron microscopy plan-view specimens using a focused ion beam system
title_short Preparation of site specific transmission electron microscopy plan-view specimens using a focused ion beam system
title_sort preparation of site specific transmission electron microscopy plan view specimens using a focused ion beam system
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AT lozanoperezs preparationofsitespecifictransmissionelectronmicroscopyplanviewspecimensusingafocusedionbeamsystem
AT titchmarshj preparationofsitespecifictransmissionelectronmicroscopyplanviewspecimensusingafocusedionbeamsystem
AT petfordlonga preparationofsitespecifictransmissionelectronmicroscopyplanviewspecimensusingafocusedionbeamsystem