Polycrystalline silicon field emitters
Field emission of electrons from polycrystalline silicon micropoint emitters has been investigated. Two process routes, wet and dry etching, were used to form emitters, and their morphologies were compared using a transmission electron microscope (TEM). TEM micrographs of the wet-etched polysilicon...
Main Authors: | Boswell, E, Huq, SE, Huang, M, Prewett, P, Wilshaw, P |
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Format: | Conference item |
Udgivet: |
1996
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Lignende værker
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Polycrystalline silicon field emitters
af: Boswell, E, et al.
Udgivet: (1995) -
Fabrication of gated polycrystalline silicon field emitters
af: Huq, SE, et al.
Udgivet: (1996) -
Microfabrication and characterization of gridded polycrystalline silicon field emitter devices
af: Huq, SE, et al.
Udgivet: (1998) -
Microfabrication and characterisation of gridded polycrystalline silicon field emitter devices
af: Huq, SE, et al.
Udgivet: (1997) -
Enhanced field emission from polysilicon emitters using porous silicon
af: Pullen, SE, et al.
Udgivet: (1996)