Polycrystalline silicon field emitters

Polycrystalline silicon field emitters

Εμφάνιση άλλων εκδόσεων (1)

Field emission of electrons from polycrystalline silicon micropoint emitters has been investigated. Two process routes, wet and dry etching, were used to form emitters, and their morphologies were compared using a transmission electron microscope (TEM). TEM micrographs of the wet-etched polysilicon...

Πλήρης περιγραφή

Λεπτομέρειες βιβλιογραφικής εγγραφής
Κύριοι συγγραφείς:	Boswell, E, Huq, SE, Huang, M, Prewett, P, Wilshaw, P
Μορφή:	Conference item
Έκδοση:	1996

Παρόμοια τεκμήρια

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