PLASMA KINETIC MEASUREMENTS USING TIME-RESOLVED ACTINOMETRY - COMPARISONS WITH LASER-INDUCED FLUORESCENCE
Optical diagnostics have been used to study the steady-state concentrations and kinetics of reactive species in CF4 and CF4/O2 plasmas. The CF2 radical was studied by two techniques, laser-induced fluorescence (LIF) and optical emission, in order to test the validity of using the latter method as a...
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| Format: | Conference item |
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1990
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