Growth of microscale In2O3 islands on Y-stabilized zirconia(100) by molecular beam epitaxy

The growth of micrometer sized arrays of InO islands on Y-stabilized ZrO(100) was investigated. Indium oxide layers were grown on Y-stabilized ZrO(100) substrates in a UHV oxide MBE system with a base pressure of 5 × 10 mbar and incorporating an indium Knudsen cell and a radiofrequency oxygen plasma...

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Main Authors: Bourlange, A, Payne, D, Jacobs, R, Egdell, R, Foord, J, Schertel, A, Dobson, P, Hutchison, J
Format: Journal article
Published: 2008
_version_ 1826297046398664704
author Bourlange, A
Payne, D
Jacobs, R
Egdell, R
Foord, J
Schertel, A
Dobson, P
Hutchison, J
author_facet Bourlange, A
Payne, D
Jacobs, R
Egdell, R
Foord, J
Schertel, A
Dobson, P
Hutchison, J
author_sort Bourlange, A
collection OXFORD
description The growth of micrometer sized arrays of InO islands on Y-stabilized ZrO(100) was investigated. Indium oxide layers were grown on Y-stabilized ZrO(100) substrates in a UHV oxide MBE system with a base pressure of 5 × 10 mbar and incorporating an indium Knudsen cell and a radiofrequency oxygen plasma source. Substrates were cleaned by exposure to the oxygen atom beam at a substrate temperature of 900 °C. Films were then grown to an estimated thickness of 120 nm with a deposition rate of 0.04 nm/s at a substrate temperature of 900 °C. The epitaxial relationship between the InO islands and the substrate is confirmed by selected area electron diffraction carried out in the HRTEM. It was observed that Y-stabilized ZrO is a versatile substrate whose lattice parameter varies with Y doping level, thus providing a means of varying the mismatch with InO epilayers.
first_indexed 2024-03-07T04:25:38Z
format Journal article
id oxford-uuid:cc82e8c8-3e21-4696-89e9-73a89f4d68be
institution University of Oxford
last_indexed 2024-03-07T04:25:38Z
publishDate 2008
record_format dspace
spelling oxford-uuid:cc82e8c8-3e21-4696-89e9-73a89f4d68be2022-03-27T07:22:37ZGrowth of microscale In2O3 islands on Y-stabilized zirconia(100) by molecular beam epitaxyJournal articlehttp://purl.org/coar/resource_type/c_dcae04bcuuid:cc82e8c8-3e21-4696-89e9-73a89f4d68beSymplectic Elements at Oxford2008Bourlange, APayne, DJacobs, REgdell, RFoord, JSchertel, ADobson, PHutchison, JThe growth of micrometer sized arrays of InO islands on Y-stabilized ZrO(100) was investigated. Indium oxide layers were grown on Y-stabilized ZrO(100) substrates in a UHV oxide MBE system with a base pressure of 5 × 10 mbar and incorporating an indium Knudsen cell and a radiofrequency oxygen plasma source. Substrates were cleaned by exposure to the oxygen atom beam at a substrate temperature of 900 °C. Films were then grown to an estimated thickness of 120 nm with a deposition rate of 0.04 nm/s at a substrate temperature of 900 °C. The epitaxial relationship between the InO islands and the substrate is confirmed by selected area electron diffraction carried out in the HRTEM. It was observed that Y-stabilized ZrO is a versatile substrate whose lattice parameter varies with Y doping level, thus providing a means of varying the mismatch with InO epilayers.
spellingShingle Bourlange, A
Payne, D
Jacobs, R
Egdell, R
Foord, J
Schertel, A
Dobson, P
Hutchison, J
Growth of microscale In2O3 islands on Y-stabilized zirconia(100) by molecular beam epitaxy
title Growth of microscale In2O3 islands on Y-stabilized zirconia(100) by molecular beam epitaxy
title_full Growth of microscale In2O3 islands on Y-stabilized zirconia(100) by molecular beam epitaxy
title_fullStr Growth of microscale In2O3 islands on Y-stabilized zirconia(100) by molecular beam epitaxy
title_full_unstemmed Growth of microscale In2O3 islands on Y-stabilized zirconia(100) by molecular beam epitaxy
title_short Growth of microscale In2O3 islands on Y-stabilized zirconia(100) by molecular beam epitaxy
title_sort growth of microscale in2o3 islands on y stabilized zirconia 100 by molecular beam epitaxy
work_keys_str_mv AT bourlangea growthofmicroscalein2o3islandsonystabilizedzirconia100bymolecularbeamepitaxy
AT payned growthofmicroscalein2o3islandsonystabilizedzirconia100bymolecularbeamepitaxy
AT jacobsr growthofmicroscalein2o3islandsonystabilizedzirconia100bymolecularbeamepitaxy
AT egdellr growthofmicroscalein2o3islandsonystabilizedzirconia100bymolecularbeamepitaxy
AT foordj growthofmicroscalein2o3islandsonystabilizedzirconia100bymolecularbeamepitaxy
AT schertela growthofmicroscalein2o3islandsonystabilizedzirconia100bymolecularbeamepitaxy
AT dobsonp growthofmicroscalein2o3islandsonystabilizedzirconia100bymolecularbeamepitaxy
AT hutchisonj growthofmicroscalein2o3islandsonystabilizedzirconia100bymolecularbeamepitaxy