An SEM EBIC study of the electronic properties of dislocations in silicon
<p>Individual, well structurally characterised dislocations present in n-type silicon have been studied using the electron beam induced current (EBIC) mode of an SEM.</p>An EBIC system has been designed and constructed which includes i) phase sensitive detection, ii) computerised contro...
Những tác giả chính: | Wilshaw, P, Wilshaw, Peter |
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Tác giả khác: | Ourmazd, A |
Định dạng: | Luận văn |
Ngôn ngữ: | English |
Được phát hành: |
1984
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Những chủ đề: |
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