Studies on etching and polymer deposition in halocarbon plasmas

<p>Plasma etching, the selective removal of materials by reaction with chemically active species formed in a glow-discharge, is widely used by the electronics industry because of the advantages over 'wet' processes. The full potential has yet to be realised because chemical processe...

Ful tanımlama

Detaylı Bibliyografya
Asıl Yazarlar: Astell-Burt, P, Astell-Burt, Peter J.
Diğer Yazarlar: Cheetham, A
Materyal Türü: Tez
Dil:English
Baskı/Yayın Bilgisi: 1987
Konular: