Contrast in atomically resolved EF-SCEM imaging

Contrast in atomically resolved EF-SCEM imaging

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Energy-filtered scanning confocal electron microscopy (EF-SCEM) is a technique that uses the reduced depth of field of an aberration-corrected transmission electron microscope to provide three-dimensional (3D) compositional information. Using a silicon sample in the <110> orientation,...

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Hoofdauteurs:	Wang, P, D'Alfonso, A, Hashimoto, A, Morgan, A, Takeguchi, M, Mitsuishi, K, Shimojo, M, Kirkland, A, Allen, L, Nellist, P
Formaat:	Journal article
Taal:	English
Gepubliceerd in:	2013

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