Contrast in atomically resolved EF-SCEM imaging
Energy-filtered scanning confocal electron microscopy (EF-SCEM) is a technique that uses the reduced depth of field of an aberration-corrected transmission electron microscope to provide three-dimensional (3D) compositional information. Using a silicon sample in the <110> orientation,...
Asıl Yazarlar: | , , , , , , , , , |
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Materyal Türü: | Journal article |
Dil: | English |
Baskı/Yayın Bilgisi: |
2013
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