Aberration-corrected HREM/STEM for semiconductor research
Aberration correction leads to a substantial improvement in the resolution of transmission electron microscopes. The JEM-2200FS in Oxford (Begbroke site) is equipped with correctors for both TEM and STEM. Alignment of the TEM and STEM correctors is achieved through variations of the Zemlin tableaux....
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Bibliographic Details
| Main Authors: |
Hetherington, C,
Cockayne, D,
Doole, R,
Hutchison, J,
Kirkland, A,
Titchmarsh, J |
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| Format: | Conference item
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| Published: |
2005
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