Aberration-corrected HREM/STEM for semiconductor research

Aberration correction leads to a substantial improvement in the resolution of transmission electron microscopes. The JEM-2200FS in Oxford (Begbroke site) is equipped with correctors for both TEM and STEM. Alignment of the TEM and STEM correctors is achieved through variations of the Zemlin tableaux....

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Main Authors: Hetherington, C, Cockayne, D, Doole, R, Hutchison, J, Kirkland, A, Titchmarsh, J
Format: Conference item
Published: 2005
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author Hetherington, C
Cockayne, D
Doole, R
Hutchison, J
Kirkland, A
Titchmarsh, J
author_facet Hetherington, C
Cockayne, D
Doole, R
Hutchison, J
Kirkland, A
Titchmarsh, J
author_sort Hetherington, C
collection OXFORD
description Aberration correction leads to a substantial improvement in the resolution of transmission electron microscopes. The JEM-2200FS in Oxford (Begbroke site) is equipped with correctors for both TEM and STEM. Alignment of the TEM and STEM correctors is achieved through variations of the Zemlin tableaux. The microscope can be used to study the same or similar regions of a sample in both TEM and STEM modes.
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spelling oxford-uuid:da4e8752-fb94-4291-b4ac-dfd3432eb63d2022-03-27T09:02:24ZAberration-corrected HREM/STEM for semiconductor researchConference itemhttp://purl.org/coar/resource_type/c_5794uuid:da4e8752-fb94-4291-b4ac-dfd3432eb63dSymplectic Elements at Oxford2005Hetherington, CCockayne, DDoole, RHutchison, JKirkland, ATitchmarsh, JAberration correction leads to a substantial improvement in the resolution of transmission electron microscopes. The JEM-2200FS in Oxford (Begbroke site) is equipped with correctors for both TEM and STEM. Alignment of the TEM and STEM correctors is achieved through variations of the Zemlin tableaux. The microscope can be used to study the same or similar regions of a sample in both TEM and STEM modes.
spellingShingle Hetherington, C
Cockayne, D
Doole, R
Hutchison, J
Kirkland, A
Titchmarsh, J
Aberration-corrected HREM/STEM for semiconductor research
title Aberration-corrected HREM/STEM for semiconductor research
title_full Aberration-corrected HREM/STEM for semiconductor research
title_fullStr Aberration-corrected HREM/STEM for semiconductor research
title_full_unstemmed Aberration-corrected HREM/STEM for semiconductor research
title_short Aberration-corrected HREM/STEM for semiconductor research
title_sort aberration corrected hrem stem for semiconductor research
work_keys_str_mv AT hetheringtonc aberrationcorrectedhremstemforsemiconductorresearch
AT cockayned aberrationcorrectedhremstemforsemiconductorresearch
AT dooler aberrationcorrectedhremstemforsemiconductorresearch
AT hutchisonj aberrationcorrectedhremstemforsemiconductorresearch
AT kirklanda aberrationcorrectedhremstemforsemiconductorresearch
AT titchmarshj aberrationcorrectedhremstemforsemiconductorresearch