Aberration-corrected HREM/STEM for semiconductor research

Aberration-corrected HREM/STEM for semiconductor research

Aberration correction leads to a substantial improvement in the resolution of transmission electron microscopes. The JEM-2200FS in Oxford (Begbroke site) is equipped with correctors for both TEM and STEM. Alignment of the TEM and STEM correctors is achieved through variations of the Zemlin tableaux....

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Bibliographic Details
Main Authors:	Hetherington, C, Cockayne, D, Doole, R, Hutchison, J, Kirkland, A, Titchmarsh, J
Format:	Conference item
Published:	2005

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