Potassium ions in SiO2: electrets for silicon surface passivation
<p>This manuscript reports an experimental and theoretical study of the transport of potassium ions in thin silicon dioxide films. While alkali contamination was largely researched in the context of MOSFET instability, recent reports indicate that potassium ions can be embedded into oxide film...
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| Médium: | Journal article |
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IOP Science
2017
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