Experimental evaluation of a spherical aberration-corrected TEM and STEM.
We have successfully developed a spherical aberration (Cs)-corrected electron microscope for probe- and image-forming systems using hexapole correctors. The performance of the microscope has been evaluated experimentally. The point resolution attained using the image-forming Cs-corrector is better t...
| Main Authors: | , , , , , , , , , , , , |
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| Format: | Journal article |
| Sprog: | English |
| Udgivet: |
2005
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