Experimental evaluation of a spherical aberration-corrected TEM and STEM.
We have successfully developed a spherical aberration (Cs)-corrected electron microscope for probe- and image-forming systems using hexapole correctors. The performance of the microscope has been evaluated experimentally. The point resolution attained using the image-forming Cs-corrector is better t...
Egile Nagusiak: | , , , , , , , , , , , , |
---|---|
Formatua: | Journal article |
Hizkuntza: | English |
Argitaratua: |
2005
|