Preparation of site specific transmission electron microscopy plan-view specimens using a focused ion beam system
A focused ion beam system was used to prepare site specific transmission electron microscopy plan view specimens. A new technique was used for this purpose. It consisted of milling a wedge shaped piece of material, lifting it out using needle and micromanipulator, and orientating it on the substrate...
| Main Authors: | , , , |
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| Format: | Journal article |
| Language: | English |
| Published: |
2001
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| Summary: | A focused ion beam system was used to prepare site specific transmission electron microscopy plan view specimens. A new technique was used for this purpose. It consisted of milling a wedge shaped piece of material, lifting it out using needle and micromanipulator, and orientating it on the substrate with the original surface vertical. Based on the lift-out technique for the preparation of a cross-section specimen, the plane-view specimen was then milled from this piece of material. |
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