Preparation of site specific transmission electron microscopy plan-view specimens using a focused ion beam system

A focused ion beam system was used to prepare site specific transmission electron microscopy plan view specimens. A new technique was used for this purpose. It consisted of milling a wedge shaped piece of material, lifting it out using needle and micromanipulator, and orientating it on the substrate...

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Bibliografische gegevens
Hoofdauteurs: Langford, R, Huang, Y, Lozano-Perez, S, Titchmarsh, J
Formaat: Journal article
Taal:English
Gepubliceerd in: 2001