Electron beam induced current investigations of transition metal impurities at extended defects in silicon
The electron beam induced current (EBIC) mode of a scanning electron microscopy is a useful technique for studying gettering of impurities to extended defects, its high sensitivity allowing very low impurity concentrations to be studied. Extended defects, when studied by EBIC, normally exhibit one o...
Κύριοι συγγραφείς: | Wilshaw, P, Fell, T |
---|---|
Μορφή: | Journal article |
Γλώσσα: | English |
Έκδοση: |
Electrochemical Soc Inc
1995
|
Παρόμοια τεκμήρια
-
Electron-beam-induced activity of defects in silicon
ανά: Wilshaw, P, κ.ά.
Έκδοση: (1994) -
ELECTRON-BEAM-INDUCED ACTIVITY OF DEFECTS IN SILICON
ανά: Wilshaw, P, κ.ά.
Έκδοση: (1994) -
EBIC INVESTIGATIONS OF DISLOCATIONS AND THEIR INTERACTIONS WITH IMPURITIES IN SILICON
ανά: Fell, T, κ.ά.
Έκδοση: (1993) -
QUANTITATIVE EBIC INVESTIGATIONS OF DEFORMATION-INDUCED AND COPPER DECORATED DISLOCATIONS IN SILICON
ανά: Fell, T, κ.ά.
Έκδοση: (1991) -
QUANTITATIVE EBIC INVESTIGATIONS OF DEFORMATION-INDUCED AND COPPER DECORATED DISLOCATIONS IN SILICON
ανά: Fell, T, κ.ά.
Έκδοση: (1991)