Improved double planar probe data analysis technique.
Plasma electron number density and ion number density in a dc multidipole weakly collisional Ar plasma are measured with a single planar Langmuir probe and a double planar probe, respectively. A factor of two discrepancy between the two density measurements is resolved by applying Sheridan's em...
| Main Authors: | , |
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| Format: | Journal article |
| Language: | English |
| Published: |
2009
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| Summary: | Plasma electron number density and ion number density in a dc multidipole weakly collisional Ar plasma are measured with a single planar Langmuir probe and a double planar probe, respectively. A factor of two discrepancy between the two density measurements is resolved by applying Sheridan's empirical formula [T. E. Sheridan, Phys. Plasmas 7, 3084 (2000)] for sheath expansion to the double probe data. |
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