Scalable high-precision trimming of photonic resonances by polymer exposure to energetic beams

Integrated photonic circuits (PICs) have seen an explosion in interest, through to commercialization in the past decade. Most PICs rely on sharp resonances to modulate, steer, and multiplex signals. However, the spectral characteristics of high-quality resonances are highly sensitive to small variat...

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Main Authors: Farmakidis, N, Yu. H, Lee, JS, Feldmann, J, Wang, M, He, Y, Aggarwal, S, Dong, B, Pernice, WHP, Bhaskaran, H
Format: Journal article
Language:English
Published: American Chemical Society 2023
_version_ 1797110792199340032
author Farmakidis, N
Yu. H
Lee, JS
Feldmann, J
Wang, M
He, Y
Aggarwal, S
Dong, B
Pernice, WHP
Bhaskaran, H
author_facet Farmakidis, N
Yu. H
Lee, JS
Feldmann, J
Wang, M
He, Y
Aggarwal, S
Dong, B
Pernice, WHP
Bhaskaran, H
author_sort Farmakidis, N
collection OXFORD
description Integrated photonic circuits (PICs) have seen an explosion in interest, through to commercialization in the past decade. Most PICs rely on sharp resonances to modulate, steer, and multiplex signals. However, the spectral characteristics of high-quality resonances are highly sensitive to small variations in fabrication and material constants, which limits their applicability. Active tuning mechanisms are commonly employed to account for such deviations, consuming energy and occupying valuable chip real estate. Readily employable, accurate, and highly scalable mechanisms to tailor the modal properties of photonic integrated circuits are urgently required. Here, we present an elegant and powerful solution to achieve this in a scalable manner during the semiconductor fabrication process using existing lithography tools: by exploiting the volume shrinkage exhibited by certain polymers to permanently modulate the waveguide’s effective index. This technique enables broadband and lossless tuning with immediate applicability in wide-ranging applications in optical computing, telecommunications, and free-space optics.
first_indexed 2024-03-07T07:59:46Z
format Journal article
id oxford-uuid:edd8058c-1177-47e8-9b38-a5ac4de5b711
institution University of Oxford
language English
last_indexed 2024-03-07T07:59:46Z
publishDate 2023
publisher American Chemical Society
record_format dspace
spelling oxford-uuid:edd8058c-1177-47e8-9b38-a5ac4de5b7112023-09-18T11:34:13ZScalable high-precision trimming of photonic resonances by polymer exposure to energetic beamsJournal articlehttp://purl.org/coar/resource_type/c_dcae04bcuuid:edd8058c-1177-47e8-9b38-a5ac4de5b711EnglishSymplectic ElementsAmerican Chemical Society2023Farmakidis, NYu. HLee, JSFeldmann, JWang, MHe, YAggarwal, SDong, BPernice, WHPBhaskaran, HIntegrated photonic circuits (PICs) have seen an explosion in interest, through to commercialization in the past decade. Most PICs rely on sharp resonances to modulate, steer, and multiplex signals. However, the spectral characteristics of high-quality resonances are highly sensitive to small variations in fabrication and material constants, which limits their applicability. Active tuning mechanisms are commonly employed to account for such deviations, consuming energy and occupying valuable chip real estate. Readily employable, accurate, and highly scalable mechanisms to tailor the modal properties of photonic integrated circuits are urgently required. Here, we present an elegant and powerful solution to achieve this in a scalable manner during the semiconductor fabrication process using existing lithography tools: by exploiting the volume shrinkage exhibited by certain polymers to permanently modulate the waveguide’s effective index. This technique enables broadband and lossless tuning with immediate applicability in wide-ranging applications in optical computing, telecommunications, and free-space optics.
spellingShingle Farmakidis, N
Yu. H
Lee, JS
Feldmann, J
Wang, M
He, Y
Aggarwal, S
Dong, B
Pernice, WHP
Bhaskaran, H
Scalable high-precision trimming of photonic resonances by polymer exposure to energetic beams
title Scalable high-precision trimming of photonic resonances by polymer exposure to energetic beams
title_full Scalable high-precision trimming of photonic resonances by polymer exposure to energetic beams
title_fullStr Scalable high-precision trimming of photonic resonances by polymer exposure to energetic beams
title_full_unstemmed Scalable high-precision trimming of photonic resonances by polymer exposure to energetic beams
title_short Scalable high-precision trimming of photonic resonances by polymer exposure to energetic beams
title_sort scalable high precision trimming of photonic resonances by polymer exposure to energetic beams
work_keys_str_mv AT farmakidisn scalablehighprecisiontrimmingofphotonicresonancesbypolymerexposuretoenergeticbeams
AT yuh scalablehighprecisiontrimmingofphotonicresonancesbypolymerexposuretoenergeticbeams
AT leejs scalablehighprecisiontrimmingofphotonicresonancesbypolymerexposuretoenergeticbeams
AT feldmannj scalablehighprecisiontrimmingofphotonicresonancesbypolymerexposuretoenergeticbeams
AT wangm scalablehighprecisiontrimmingofphotonicresonancesbypolymerexposuretoenergeticbeams
AT hey scalablehighprecisiontrimmingofphotonicresonancesbypolymerexposuretoenergeticbeams
AT aggarwals scalablehighprecisiontrimmingofphotonicresonancesbypolymerexposuretoenergeticbeams
AT dongb scalablehighprecisiontrimmingofphotonicresonancesbypolymerexposuretoenergeticbeams
AT pernicewhp scalablehighprecisiontrimmingofphotonicresonancesbypolymerexposuretoenergeticbeams
AT bhaskaranh scalablehighprecisiontrimmingofphotonicresonancesbypolymerexposuretoenergeticbeams