Atom probe Tomography of fast-diffusing impurities and the effect of gettering in multicrystalline silicon

This article demonstrates an approach for multiscale characterisation of individual defects, such as grain boundaries, in multicrystalline silicon. The analysis techniques range from macroscale characterisation of average bulk lifetime, through photoluminescence to resolve spatial recombination, and...

Deskribapen osoa

Xehetasun bibliografikoak
Egile Nagusiak: Tweddle, D, Shaw, E, Douglas, J, Bonilla, R, Moody, M, Hamer, P, Wilshaw, P
Formatua: Conference item
Argitaratua: AIP Publishing 2018
_version_ 1826303841333673984
author Tweddle, D
Shaw, E
Douglas, J
Bonilla, R
Moody, M
Hamer, P
Wilshaw, P
author_facet Tweddle, D
Shaw, E
Douglas, J
Bonilla, R
Moody, M
Hamer, P
Wilshaw, P
author_sort Tweddle, D
collection OXFORD
description This article demonstrates an approach for multiscale characterisation of individual defects, such as grain boundaries, in multicrystalline silicon. The analysis techniques range from macroscale characterisation of average bulk lifetime, through photoluminescence to resolve spatial recombination, and finally to nanoscale analysis of the crystallographic characteristics and impurity decoration of the grain boundary using Transmission Kikuchi Diffraction and Atom Probe Tomography. This method can be used to characterise defects and their response to processing, such as gettering and hydrogen passivation. In this paper it is applied to the test case of Saw Damage Gettering on Red Zone High Performance Multicrystalline Silicon. In both as-cast and gettered samples, copper and chromium were observed at a recombination active, random angle grain boundary. After gettering the copper excess was found to decrease. In contrast, the slower diffusing chromium was found to increase, potentially indicating internal gettering. At a recombination inactive Σ3 grain boundary only oxygen was observed at the boundary before gettering, with no transition metals detected.
first_indexed 2024-03-07T06:08:49Z
format Conference item
id oxford-uuid:eec3a4d3-3861-42d5-a8b3-e4a009f18c8d
institution University of Oxford
last_indexed 2024-03-07T06:08:49Z
publishDate 2018
publisher AIP Publishing
record_format dspace
spelling oxford-uuid:eec3a4d3-3861-42d5-a8b3-e4a009f18c8d2022-03-27T11:35:19ZAtom probe Tomography of fast-diffusing impurities and the effect of gettering in multicrystalline siliconConference itemhttp://purl.org/coar/resource_type/c_5794uuid:eec3a4d3-3861-42d5-a8b3-e4a009f18c8dSymplectic Elements at OxfordAIP Publishing2018Tweddle, DShaw, EDouglas, JBonilla, RMoody, MHamer, PWilshaw, PThis article demonstrates an approach for multiscale characterisation of individual defects, such as grain boundaries, in multicrystalline silicon. The analysis techniques range from macroscale characterisation of average bulk lifetime, through photoluminescence to resolve spatial recombination, and finally to nanoscale analysis of the crystallographic characteristics and impurity decoration of the grain boundary using Transmission Kikuchi Diffraction and Atom Probe Tomography. This method can be used to characterise defects and their response to processing, such as gettering and hydrogen passivation. In this paper it is applied to the test case of Saw Damage Gettering on Red Zone High Performance Multicrystalline Silicon. In both as-cast and gettered samples, copper and chromium were observed at a recombination active, random angle grain boundary. After gettering the copper excess was found to decrease. In contrast, the slower diffusing chromium was found to increase, potentially indicating internal gettering. At a recombination inactive Σ3 grain boundary only oxygen was observed at the boundary before gettering, with no transition metals detected.
spellingShingle Tweddle, D
Shaw, E
Douglas, J
Bonilla, R
Moody, M
Hamer, P
Wilshaw, P
Atom probe Tomography of fast-diffusing impurities and the effect of gettering in multicrystalline silicon
title Atom probe Tomography of fast-diffusing impurities and the effect of gettering in multicrystalline silicon
title_full Atom probe Tomography of fast-diffusing impurities and the effect of gettering in multicrystalline silicon
title_fullStr Atom probe Tomography of fast-diffusing impurities and the effect of gettering in multicrystalline silicon
title_full_unstemmed Atom probe Tomography of fast-diffusing impurities and the effect of gettering in multicrystalline silicon
title_short Atom probe Tomography of fast-diffusing impurities and the effect of gettering in multicrystalline silicon
title_sort atom probe tomography of fast diffusing impurities and the effect of gettering in multicrystalline silicon
work_keys_str_mv AT tweddled atomprobetomographyoffastdiffusingimpuritiesandtheeffectofgetteringinmulticrystallinesilicon
AT shawe atomprobetomographyoffastdiffusingimpuritiesandtheeffectofgetteringinmulticrystallinesilicon
AT douglasj atomprobetomographyoffastdiffusingimpuritiesandtheeffectofgetteringinmulticrystallinesilicon
AT bonillar atomprobetomographyoffastdiffusingimpuritiesandtheeffectofgetteringinmulticrystallinesilicon
AT moodym atomprobetomographyoffastdiffusingimpuritiesandtheeffectofgetteringinmulticrystallinesilicon
AT hamerp atomprobetomographyoffastdiffusingimpuritiesandtheeffectofgetteringinmulticrystallinesilicon
AT wilshawp atomprobetomographyoffastdiffusingimpuritiesandtheeffectofgetteringinmulticrystallinesilicon