Self-organized etching technique for fabricating a quasiregular array of MnAs nanoislands
Self organized etching techniques for fabricating a quasiregular array of MnAs nanoislands were discussed. The strain balance in the MnAs layer grown on GaAs substrates collapsed when the heterostructure was immersed in a wet-chemical etch solution and regular row of cracks and submicron-wide strips...
Asıl Yazarlar: | , , , , , , |
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Materyal Türü: | Journal article |
Dil: | English |
Baskı/Yayın Bilgisi: |
2003
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_version_ | 1826304236160286720 |
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author | Takagaki, Y Wiebicke, E Hesjedal, T Kostial, H Herrmann, C Daweritz, L Ploog, K |
author_facet | Takagaki, Y Wiebicke, E Hesjedal, T Kostial, H Herrmann, C Daweritz, L Ploog, K |
author_sort | Takagaki, Y |
collection | OXFORD |
description | Self organized etching techniques for fabricating a quasiregular array of MnAs nanoislands were discussed. The strain balance in the MnAs layer grown on GaAs substrates collapsed when the heterostructure was immersed in a wet-chemical etch solution and regular row of cracks and submicron-wide strips were carved from it. It was also shown that MnAs islands could serve as a nearly ideal etch mask to create GaAs columns by dry etching. |
first_indexed | 2024-03-07T06:14:43Z |
format | Journal article |
id | oxford-uuid:f0affb1b-7e1d-46fb-a260-f25c9887dbd8 |
institution | University of Oxford |
language | English |
last_indexed | 2024-03-07T06:14:43Z |
publishDate | 2003 |
record_format | dspace |
spelling | oxford-uuid:f0affb1b-7e1d-46fb-a260-f25c9887dbd82022-03-27T11:50:06ZSelf-organized etching technique for fabricating a quasiregular array of MnAs nanoislandsJournal articlehttp://purl.org/coar/resource_type/c_dcae04bcuuid:f0affb1b-7e1d-46fb-a260-f25c9887dbd8EnglishSymplectic Elements at Oxford2003Takagaki, YWiebicke, EHesjedal, TKostial, HHerrmann, CDaweritz, LPloog, KSelf organized etching techniques for fabricating a quasiregular array of MnAs nanoislands were discussed. The strain balance in the MnAs layer grown on GaAs substrates collapsed when the heterostructure was immersed in a wet-chemical etch solution and regular row of cracks and submicron-wide strips were carved from it. It was also shown that MnAs islands could serve as a nearly ideal etch mask to create GaAs columns by dry etching. |
spellingShingle | Takagaki, Y Wiebicke, E Hesjedal, T Kostial, H Herrmann, C Daweritz, L Ploog, K Self-organized etching technique for fabricating a quasiregular array of MnAs nanoislands |
title | Self-organized etching technique for fabricating a quasiregular array of MnAs nanoislands |
title_full | Self-organized etching technique for fabricating a quasiregular array of MnAs nanoislands |
title_fullStr | Self-organized etching technique for fabricating a quasiregular array of MnAs nanoislands |
title_full_unstemmed | Self-organized etching technique for fabricating a quasiregular array of MnAs nanoislands |
title_short | Self-organized etching technique for fabricating a quasiregular array of MnAs nanoislands |
title_sort | self organized etching technique for fabricating a quasiregular array of mnas nanoislands |
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