The indentation response of GaAs-AlAs heterostructures

Low-load indentation has been used to investigate the deformation behaviour of a submicron layer of AlAs on a GaAs substrate. High-resolution scanning electron microscopy of cross-sections through the deformed regions under indentations into this structure reveals that the softer AlAs layer is not p...

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書目詳細資料
Main Authors: Castell, M, Shafirstein, G, Ritchie, D
格式: Conference item
出版: 1996
實物特徵
總結:Low-load indentation has been used to investigate the deformation behaviour of a submicron layer of AlAs on a GaAs substrate. High-resolution scanning electron microscopy of cross-sections through the deformed regions under indentations into this structure reveals that the softer AlAs layer is not penetrated by the indenter and that unusual lateral cracking originates during the unloading phase. Data of intendation load against depth demonstrates the effect of the layer through the increase in composite hardness and elastic modulus with increasing load.