The indentation response of GaAs-AlAs heterostructures
Low-load indentation has been used to investigate the deformation behaviour of a submicron layer of AlAs on a GaAs substrate. High-resolution scanning electron microscopy of cross-sections through the deformed regions under indentations into this structure reveals that the softer AlAs layer is not p...
Hauptverfasser: | Castell, M, Shafirstein, G, Ritchie, D |
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Format: | Conference item |
Veröffentlicht: |
1996
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