Photonic crystals for the visible spectrum by holographic lithography
We describe a general and flexible technique for the fabrication of three-dimensional photonic crystals that is particularly well adapted to the production of structures with the sub-micron periodicity required for applications in the visible optical spectrum. Three-dimensional microstructure is gen...
Main Authors: | , , , , , |
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格式: | Journal article |
語言: | English |
出版: |
2002
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總結: | We describe a general and flexible technique for the fabrication of three-dimensional photonic crystals that is particularly well adapted to the production of structures with the sub-micron periodicity required for applications in the visible optical spectrum. Three-dimensional microstructure is generated by using a four-beam laser interference pattern to expose a thick layer of photoresist. Exposed areas are rendered insoluble; unexposed areas are dissolved away leaving a three-dimensional photonic crystal formed of cross-linked polymer with air-filled voids. The polymeric structure may be used as a template for the production of photonic crystals with higher refractive index contrast. Photonic crystals made of polymer and of TiO 2 have been characterized by scanning electron microscopy and by optical diffraction measurements. |
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