AIN coatings on silicon field emitters and oxidised gates to enhance reliability for space applications
The development of coatings for silicon field emission arrays used as an electron source to maintain spacecraft charge neutrality was described. The neutralizer specification included 6mA emission current at 0.2 W/mA and the instrument was required to operate for a lifetime of more than 6000 hours....
| Main Authors: | , , , , , , , , , |
|---|---|
| 格式: | Conference item |
| 出版: |
2004
|