Study on the performance enhancement mechanism of the mosfet device based on Si/SiGe strained silicon / Hashimah Hashim and Ahmad Sabirin Zoolfakar
This research is carried out to deposit and characterizes nanostructured Zinc Oxide (ZnO) thin film by radio frequency (RF) magnetron sputtering method for ammonia (NH3 ) gas sensor application. The sensitivity of sensor is mainly depends on the surface reaction effect which strongly depends on the...
| Main Authors: | , |
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| Format: | Research Reports |
| Language: | English |
| Published: |
2007
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| Subjects: | |
| Online Access: | https://ir.uitm.edu.my/id/eprint/20366/1/20366.pdf |