Pembangunan kaedah reka bentuk dan fabrikasi diafram beralun silikon menggunakan teknik punaran anisotropik KOH
This study is on the development of a new design method of silicon corrugated diaphragm using KOH anisotropic etching technique. Design rules for designing and fabricating corrugated silicon diaphragm structures were developed based on the application of the design rules for corrugated metal diaph...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
2006
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| Online Access: | http://journalarticle.ukm.my/1456/1/2006-15.pdf |